| 摘要 |
The invention relates to a method of manipulating a sample (100) in an evacuated chamber of a charged particle apparatus, the method performed in said evacuated chamber, the method comprising:
€¢ A step of providing a sample (100) on a first substrate (300),
€¢ A step of bringing an extremal end of a manipulator (304) in contact with the sample,
€¢ A step of attaching the sample to said extremal end, the attaching being a removable attaching,
€¢ A step of lifting the sample attached to the extremal end of the manipulator from the first substrate and transport the sample to a second substrate (308),
€¢ A step of attaching the sample to the second substrate,
€¢ A step of detaching the sample from the extremal end of the manipulator,
Characterized in that
€¢ At least one of the steps of attaching the sample comprises attaching the sample to a bundle of carbon nanotubes (306), said step a step of detachably attaching the sample to said carbon nanotubes. The use of a carbon nanotubes (CNT) function area results in a quick method for attaching/detaching a sample avoiding the risks of losing a sample when electrostatically gripped or the risks of mechanical deformation when using a mechanical gripper. |
