| 摘要 |
A graphite structure includes a graphite plate (1) that is made of a highly heat conductive material and has a thickness of 15 μm or less. A Ti layer (3) having a thickness of 10 nm to 200 nm covers the inner surfaces of through holes (2) penetrating the laminate of the graphite plate (1) from the front side to the back side of the laminate. Furthermore, continuous holes (4) are formed inside the through holes (2). This configuration can achieve a smaller thickness and high reliability while keeping high thermal conductivity of graphite. |
