スモールフォームファクタのマイクロフューズドシリコン歪みゲージ（ＭＳＧ）圧力センサパッケージング

摘要

A pressure sensor assembly (10) includes a base including a radially offset pressure port. An electronics package (24) may be included within a housing generally alongside the offset pressure port. Accordingly, the pressure sensor assembly exhibits a substantially smaller diameter than previously achieved. Methods of fabrication are provided.