| 摘要 |
PROBLEM TO BE SOLVED: To provide a confocal microscope system configured to detect a profile curve of a surface of an object accurately at a high speed, an image processing method, and an image processing program.SOLUTION: In a unit area on a surface of an object S, one-dimensional scanning is performed with a laser beam on measurement lines parallel to a first direction, and the one-dimensional scanning is repeated with displacement in a second direction orthogonal to the first direction. The laser beam reflected by the object S is received by a light-receiving element 30, and multiple pieces of pixel data on the measurement lines are sequentially acquired. In a profile-curve data acquisition range which is larger in the first direction and smaller in the second direction than the unit area, first and second two-dimensional data are generated which indicate peak intensity and peak position of a receiving light intensity distribution in an optical axis direction of an objective lens, respectively, for each pixel. A profile curve corresponding to a position of the measurement line designated on an image based on the fist two-dimensional data, is displayed on the basis of the second two-dimensional data. |
