| 发明名称 |
A PROCESSING APPARATUS FOR PROCESSING DEVICES, PARTICULARLY DEVICES INCLUDING ORGANIC MATERIALS THEREIN, AND METHOD FOR TRANSFERRING AN EVAPORATION SOURCE FROM A PROCESSING VACUUM CHAMBER TO A MAINTENANCE VACUUM CHAMBER OR FROM THE MAINTENANCE VACUUM CHAMBER TO THE PROCESSING VACUUM CHAMBER |
| 摘要 |
|
| 申请公布号 |
EP3080328(A1) |
申请公布日期 |
2016.10.19 |
| 申请号 |
EP20140752870 |
申请日期 |
2014.08.19 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
DIEGUEZ-CAMPO, JOSE MANUEL;BANGERT, STEFAN;SCHÜSSLER, UWE;HAAS, DIETER |
| 分类号 |
C23C14/04;B05D1/00;B05D1/02;B05D3/04;C23C14/12;C23C14/24;C23C14/56;C23C16/44;H01L51/00;H01L51/56 |
主分类号 |
C23C14/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
