发明名称 アクチュエータ、セル基板複合体、セル基板複合体の製造方法及びアクチュエータの製造方法
摘要 PROBLEM TO BE SOLVED: To provide an actuator in which electrode layers are disposed to cover both opposite surfaces of each of piezoelectric body layers laminated in layers in a thickness direction.SOLUTION: An actuator 10 comprises: a first space 12 and a second space 13 disposed around a columnar hollow part 11 and forming double spirals; and a spiral first cell 14 and a second cell 15 forming one and the other boundaries between both the spaces. The first cell 14 includes: a first electrode layer 14a in contact with the first space 12; a second electrode layer 14b in contact with the second space 13; and a first piezoelectric body layer 14c held between both the layers. The second cell 15 includes: a third electrode layer 15a in contact with the first space 12; a fourth electrode layer 15b in contact with the second space 13; and a second piezoelectric body layer 15c held between both the layers. In the first space 12, first rib layers 16a, 17a having elasticity and electrically connecting the first electrode layer 14a and the third electrode layer 15a are disposed and in the second space, second rib layers 16b, 17b having elasticity and electrically connecting the second electrode layer 14b and the fourth electrode layer 15b are disposed.
申请公布号 JP6011325(B2) 申请公布日期 2016.10.19
申请号 JP20120283483 申请日期 2012.12.26
申请人 富士通株式会社 发明人 表 孝司
分类号 H01L41/047;G06F3/041;H01L41/083;H01L41/09;H01L41/312;H01L41/313 主分类号 H01L41/047
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