| 摘要 |
Disclosed is a wafer- or flat glass-chuck (1) for a stepper useful for lithography. The wafer- or flat glass-chuck for use in photolithography for fabricating a semiconductor device or an LCD or PDP comprises a plurality of regularly spaced, embossed, frusto-pyramidal dots (2) in a grid pattern thereon, with a vacuum hole (3) established in a central portion of every other dot. In the wafer- or flat glass sheet-chuck, the establishment of vacuum holes only in some of the plurality of dots can reduce the processing time and labor, compared to establishment in all dots, while guaranteeing an evacuation effect sufficient to hold the wafer or flat glass sheet. In addition, frusto-pyramidal dots are advantageous in terms of processing time and cost, compared to cylindrical dots |
