发明名称 メトロロジ用の反射屈折照明システム
摘要 A catadioptric optical system (1200) operates in a wide spectral range. In an embodiment, the catadioptric optical system (1200) includes a first reflective surface (57) positioned and configured to reflect radiation; a second reflective surface (58) positioned and configured to reflect radiation reflected from the first reflective surface as a collimated beam, the second reflective surface having an aperture to allow transmission of radiation through the second reflective surface; and a channel structure (1380) extending from the aperture toward the first reflective surface and having an outlet (1330), between the first reflective surface and the second reflective surface, to supply radiation to the first reflective surface.
申请公布号 JP6006919(B2) 申请公布日期 2016.10.12
申请号 JP20110133105 申请日期 2011.06.15
申请人 エーエスエムエル ホールディング エヌ.ブイ. 发明人 スミルノフ,スタニスラフ,ワイ.;シャマレフ,イェヴゲニー,コンスタンティノヴィッチ
分类号 G01N21/47;G01N21/21;G01N21/27;G02B17/08;H01L21/027;H01L21/66 主分类号 G01N21/47
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