摘要 |
<P>PROBLEM TO BE SOLVED: To provide a water-cooled cable capable of using in a high vacuum atmosphere without deteriorating degree of vacuum caused by a discharged gas and contaminating a peripheral circumference, and to provide a vacuum heating device having the water-cooled cable. <P>SOLUTION: The water-cooled cable 20 having a cooling water passage 20c circulating cooling water is prepared for supplying the cooling water and a power source in a vacuum atmosphere, and has a conductor 20a for supplying the power source, and a nearly-tubular coated tube 20b externally fitted by holding the cooling water passage 20c between the coated tube 20b and the conductor 20a and formed with a flexible insulating material wherein heat-resistant temperature is 100°C or more and at most an amount of the discharged gas of an outer cover is 10<SP>-4 (</SP>Pa m<SP>3</SP>)/(s m<SP>2</SP>) or below. <P>COPYRIGHT: (C)2011,JPO&INPIT |