发明名称 吸着テーブル
摘要 PROBLEM TO BE SOLVED: To provide a suction table which moves up and down a display panel on a suction surface when the display panel is delivered without causing the complication of the structure and causing strong stress to locally act on the display panel.SOLUTION: A suction table according to this invention holds a display panel and includes: a supporting base having a suction surface where a negative pressure opening opens; multiple lifting bars that are disposed across the suction surface; multiple recesses which are provided on the suction surface being arranged in parallel with each other so as to house the lifting bars in the support base without causing the lifting bars to protrude from the suction surface; a support mechanism supporting the lifting bars at a side part of the support base where the multiple recesses open so that the lifting bars move up and down; and a lifting device which is provided associated with the support mechanism so as to move up and down each lifting bar between an up position where the lifting bar protrudes from the recess and a down position where the lifting bar is housed in the recess.
申请公布号 JP6006538(B2) 申请公布日期 2016.10.12
申请号 JP20120127005 申请日期 2012.06.04
申请人 株式会社日本マイクロニクス 发明人 高木 一也;白戸 順;山谷 柳逸
分类号 H01L21/683 主分类号 H01L21/683
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