| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage structure capable of obtaining a sufficient pre-pressure without disposing magnetic poles and capable of reducing the thickness thereof.SOLUTION: The stage structure is configured including: a fixed plate 2; a moving plate 3; linear guide paths 4 and 5 of a V-groove for the moving plate 3; steel balls 6 for supporting the moving plate 3; and a permanent magnet 10 disposed in a pocket processing part 9. By using the pocket processing part 9 to function as a yoke, pre-pressure is increased by the permanent magnet 10 the thickness can be reduced by eliminating magnetic poles. |
