发明名称 |
Positive resist composition for immersion exposure and pattern-forming method using the same |
摘要 |
A positive resist composition for immersion exposure comprises: (A) a resin containing at least one repeating unit having a fluorine atom and increasing a solubility of the resin in an alkali developer by an action of an acid; and (B) a compound capable of generating an acid upon irradiation with one of an actinic ray and radiation. |
申请公布号 |
EP1580598(B1) |
申请公布日期 |
2016.10.12 |
申请号 |
EP20050005530 |
申请日期 |
2005.03.14 |
申请人 |
FUJIFILM CORPORATION |
发明人 |
INABE, HARUKI;KANNA, SHINICHI;KANDA, HIROMI |
分类号 |
G03F7/004;G03F7/039;G03F7/20 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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