| 摘要 |
A method of calibrating a Scanning Transmission Charged-Particle Microscope comprising:
- A specimen holder, for holding a specimen;
- A source, for producing a beam of charged particles;
- An illuminator, for directing said beam so as to irradiate the specimen;
- An imaging system, for directing charged particles that traverse the specimen onto a detector;
- Scanning means, for causing said beam to undergo scanning motion relative to a surface of the specimen,
which microscope can be operated in:
- A non-scanning mode, whereby said beam is relatively broad and said detector forms an image without invocation of said scanning means; or
- A scanning mode, whereby said beam is relatively narrow and said detector accumulates an image as a function of scan position of said beam,
which method comprises the following steps:
- Providing a calibration specimen on said specimen holder;
- In non-scanning mode, using said detector to form a calibration image of the calibration specimen, using a given configuration of said imaging system;
- Utilizing a known dimension of said calibration specimen and comparing it to a corresponding dimension in said calibration image to calibrate a characteristic dimension of a field of view of said detector;
- In scanning mode, recording a beam pattern of said beam in the calibrated field of view of said detector, and examining the recorded beam pattern to derive a geometric aspect thereof. |
