| 摘要 |
Holding equipment for holding a plate-like member by discharging fluid to generate a negative pressure between the holding equipment and the member, includes a columnar main body, a flat end face formed at the main body, that faces the member, a concave part formed at the end face, one or more fluid passages that discharge fluid into the concave part to form a swirl flow or a radial flow, and a liquid supply means for supplying a part of the member with a liquid, the part facing the centre of the swirl flow or the radial centre of the radial flow. |
