发明名称 ウェハ加工用テープ
摘要 PROBLEM TO BE SOLVED: To provide a wafer processing tape which allows for easy determination whether or not lamination is performed under conditions suitable for the characteristics, while suppressing occurrence of die shift.SOLUTION: When the maximum length of the tape in the longitudinal direction is A and the maximum length of the tape in the width direction is B, in a sticking area P of a wafer processing tape 1 where tension is applied most during lamination, a marking 9 is provided in a region where A is 2-10 mm and B is 2-20 mm. Consequently, change in the shape of the marking 9 can be determined visually and easily. A determination can be made easily whether or not lamination is performed under conditions suitable for the characteristics, and occurrence of die shift in the following dicing step can be suppressed.
申请公布号 JP6007572(B2) 申请公布日期 2016.10.12
申请号 JP20120102501 申请日期 2012.04.27
申请人 日立化成株式会社 发明人 鈴村 浩二;作田 竜弥;岩永 有輝啓
分类号 H01L21/301;C09J7/02;H01L21/52 主分类号 H01L21/301
代理机构 代理人
主权项
地址