HOLDING DEVICE, HOLDING SYSTEM, CONTROL METHOD, AND CONVEYANCE DEVICE

摘要

Swirl flow-forming body 1 for holding a plate-like member by discharging fluid to generate a negative pressure between the swirl flow-forming body and the member includes columnar main body 11, flat end face 13 formed at the main body, that faces the member, concave part 12 formed at the end face, introduction passages 17a and 17c that discharge liquid into the concave part to from a liquid swirl flow, and introduction passages 17b and 17d that discharge gas into the concave part to from a gas swirl flow.