| 摘要 |
PROBLEM TO BE SOLVED: To provide a local cleaning system capable of supplying necessary irreducible clean air and also supplying the clean air over the entire region to be cleaned.SOLUTION: There is provided a local cleaning system 1 which supplies clean air to a region to be cleaned at a periphery of a film 100 arranged along a horizontal plane, the local cleaning system 1 including barrier air current generation plates 20 which generate an air current to prevent contaminations outside the region to be cleaned from entering the region to be cleaned by being controlled to tilt at a predetermined angle away from a pair of fan filter units 10 with the distance from the fan filter units 10 based upon the fan filter units, the fan filter units being arranged opposite each other in a horizontal direction with at least a part of the film 100 interposed. |
