| 摘要 |
PROBLEM TO BE SOLVED: To provide a dicing method capable of performing dicing along a dicing scheduled line from a rear face regardless of a kind and a state of a pattern on a surface, flatness of the rear face, thickness of a workpiece and the like.SOLUTION: A method for dicing a workpiece 11 on which a dicing scheduled line 13 is formed and that has a notch section 17 from a rear face includes: a step of picking up an image of the workpiece 11 from a surface and forming an image; a dicing scheduled line position storage step of detecting and storing a position of the dicing scheduled line 13 from the notch section 17 on the outer periphery based on the picked-up image; a holding step of holding a surface side by a chuck table and exposing the rear face; a step of picking up the image of the rear face of the workpiece 11 and detecting the notch section 17; and a step of indicating the picked-up image with indication means by forming a reverse image with right and left sides are reversed with the notch section 17 as a reference, and dicing the workpiece 11 from the rear face based on the notch section 17 of the workpiece 11 and the dicing scheduled line position 13. |
