| 摘要 |
In a substrate process system which includes a plurality of arranged process machines 18, 78, 80, and 90, and in which a circuit substrate is transported from an upstream process machine to a downstream process machine, the process machine 80 inspects small electronic components, and the process machine 90 inspects large electronic components. The small mounted components are preferably inspected in detail; however, when the detailed inspection is performed, an inspection process time increases. In contrast, when the large mounted components are inspected, it is not necessary to inspect the large electronic components in detail to the degree that the small electronic components are inspected. For this reason, according to this system, it is possible to reliably inspect the small mounted components even though the inspection process requires a certain length of time, and it is possible to inspect the large components in less detail than the inspection process for the small components. Accordingly, it is possible to reliably perform an inspection process, and to decrease an inspection time at the same time. |
