发明名称 |
Flow sensor for monitoring a flow parameter and method of determining the same |
摘要 |
A flow sensor for determining a flow parameter of a fluid is shown in embodiment examples of the present invention, comprising a sensor chip, which has at least one thermal membrane sensor element, which is designed to determine the flow parameter of the fluid in a measurement region or to determine a fluid temperature of the fluid, wherein the thermal membrane sensor element has two thermocouple junctions arranged at a distance from each other and a heating element arranged between the thermocouple junctions, and wherein the sensor chip is designed for the fluid to flow around the sensor chip as a freestanding sensor finger during the operation of the flow sensor. |
申请公布号 |
EP2869040(B1) |
申请公布日期 |
2016.10.12 |
申请号 |
EP20140190553 |
申请日期 |
2012.08.28 |
申请人 |
HAHN-SCHICKARD-GESELLSCHAFT FÜR ANGEWANDTE FORSCHUNG E.V. |
发明人 |
HEDRICH, FRANK;BILLAT, SOPHIE;STORZ, MATTHIAS;KATTINGER, GERHARD;ASHAUER, MATTHIAS |
分类号 |
G01F1/684;G01F1/688;G01N25/56 |
主分类号 |
G01F1/684 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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