| 摘要 |
PROBLEM TO BE SOLVED: To provide a single crystal growth apparatus that is for floating molten zone type single crystal manufacture in which a single crystal is raised from a raw material rod, and can reduce laser power source costs.SOLUTION: The present invention relates to a single crystal growth device 100 which raises a single crystal from a raw material rod 1, the single crystal growth device 100 comprising: a semiconductor laser device 20 which has a laser power source 10 and emits semiconductor laser light 5 based upon electric power supplied by the laser power source 10; a laser light division device 30 which divides the semiconductor laser light 5 into M heating laser light beams 3; and laser irradiation heads 50-55 which emit the M heating laser light beams 3 toward the raw material rod 1. In the single crystal growth device 100, the laser light division device 30 comprises: a collimator lens which converts the semiconductor laser light into parallel light; a plurality of division mirrors which divide the semiconductor laser light into M semiconductor laser light beams; a plurality of attenuation mirrors which equalize laser light intensity among the M semiconductor laser light beams; and a condenser lens which condenses the M semiconductor laser light beams on optical fibers 41-45.SELECTED DRAWING: Figure 1 |
