| 摘要 |
PROBLEM TO BE SOLVED: To provide a turbomolecular pump that can inhibit deposition of a product material at an inner peripheral surface of a spacer.SOLUTION: The turbomolecular pump 1 includes: multiple stationary blades 21 laminated via an annular spacer 29B; and multiple rotary vanes 12 rotating relative to the multiple stationary blades 21. The spacer 29B is provided with a heat resistance part 290 for inhibiting heat transfer to an outer peripheral part 292 from an inner peripheral part 291 of the spacer 29B.SELECTED DRAWING: Figure 3 |
