发明名称 |
SEMICONDUCTOR DEVICE MANUFACTURING METHOD |
摘要 |
This semiconductor device manufacturing method involves: a first step for providing a first wiring 3 on a first surface 2a of a semiconductor substrate 2; a second step for mounting a light transmitting substrate 5 on the first surface 2a; a third step for making the semiconductor substrate 2 thinner such that the semiconductor substrate 2 is less thick than the light transmitting substrate 5; a fourth step for forming a through-hole 7 in the semiconductor substrate 2; a fifth step for providing a resin insulation layer 10 by dip coating using a first resin material; a sixth step for forming a contact hole 16 on the resin insulation layer 10; and a seventh step for providing a second wiring 8 on the surface 10b of the resin insulation layer 10 and electrically connecting the first wiring 3 and the second wiring 8 in the contact hole 16. |
申请公布号 |
WO2016159318(A1) |
申请公布日期 |
2016.10.06 |
申请号 |
WO2016JP60832 |
申请日期 |
2016.03.31 |
申请人 |
HAMAMATSU PHOTONICS K.K. |
发明人 |
HOSOKAWA Noburo;INOUE Nao;SHIBAYAMA Katsumi |
分类号 |
H01L21/3205;H01L21/768;H01L23/522;H01L23/532 |
主分类号 |
H01L21/3205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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