EXPOSURE DEVICE, METHOD FOR PRODUCING FLAT PANEL DISPLAY, METHOD FOR PRODUCING DEVICE, AND EXPOSURE METHOD

摘要

This liquid crystal exposure device (10) which performs scanning exposure by irradiating a substrate (P) with illuminating light (IL) via a projection optical system (30), and driving the projection optical system (PL) relative to the substrate (P), is equipped with alignment microscopes (62, 64) which perform mark detection of marks (Mk) provided on a substrate (P), a first drive system that drives the alignment microscopes (62, 64), a second drive system that drives the projection optical system (40), and a control device that controls the first and second drive systems in such a manner that the alignment microscopes (62, 64) are driven before the projection optical system (40) is driven. As a result of this configuration it is possible to minimize tact time required for exposure.