发明名称 |
OBJECT CONVEYANCE APPARATUS, EXPOSURE APPARATUS, FLAT PANEL DISPLAY PRODUCTION METHOD, DEVICE PRODUCTION METHOD, OBJECT CONVEYANCE METHOD, AND EXPOSURE METHOD |
摘要 |
This method for conveying a substrate (P) to a substrate holder (28) involves: using holding pads (84b) to hold a portion of the substrate (P) positioned above the substrate holder (28); and, when the holding of another portion of the substrate (P) by a substrate loading hand (62) for holding the other portion of the substrate (P) positioned above the substrate holder (28) is released, driving and controlling the holding pads (84b) holding the substrate (P) downwards such that the substrate (P) is supported on a support surface of the substrate holder (28). As a result, the substrate can be swiftly conveyed to the substrate holder. |
申请公布号 |
WO2016159062(A1) |
申请公布日期 |
2016.10.06 |
申请号 |
WO2016JP60358 |
申请日期 |
2016.03.30 |
申请人 |
NIKON CORPORATION |
发明人 |
AOKI, Yasuo;NAGASHIMA, Masayuki;YAMANAKA, Takahiro |
分类号 |
G03F7/20;B65G49/06;H01L21/677 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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