| 发明名称 |
STAGE APPARATUS AND MICROSCOPE |
| 摘要 |
A stage apparatus includes a plate-like stage plate having a spread in a first direction and a second direction intersecting with the first direction and a plate member having a linear expansion coefficient different from that of the stage plate. The stage apparatus includes: a first holding unit configured to hold the plate member on the stage plate; a second holding unit configured to hold the plate member on the stage plate, allow relative deformation caused between the stage plate and the plate member in the first direction, and constrain the relative deformation in the second direction; and a third holding unit configured to hold the plate member on the stage plate, constrain the deformation in the first direction, and allow the deformation in the second direction. |
| 申请公布号 |
US2016291309(A1) |
申请公布日期 |
2016.10.06 |
| 申请号 |
US201615087033 |
申请日期 |
2016.03.31 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
Sakai Akihiro |
| 分类号 |
G02B21/26;G02B21/36 |
主分类号 |
G02B21/26 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A stage apparatus including a plate-like stage plate having a spread in a first direction and a second direction intersecting with the first direction and a plate member having a linear expansion coefficient different from that of the stage plate, the apparatus comprising:
a first holding unit configured to hold the plate member on the stage plate; a second holding unit configured to hold the plate member on the stage plate, allow relative deformation caused between the stage plate and the plate member in the first direction based on a difference between the linear expansion coefficients, and constrain the relative deformation in the second direction; and a third holding unit configured to hold the plate member on the stage plate, constrain the deformation in the first direction, and allow the deformation in the second direction. |
| 地址 |
Tokyo JP |
