THERMAL SENSOR ARRANGEMENT AND METHOD OF MAKING THE SAME

摘要

A temperature sensor arrangement in an integrated circuit (IC) includes a sensor array configured to determine a temperature of the IC. The sensor array includes a first transistor having a first terminal, a second terminal and a gate. The temperature sensor array further includes a guard ring region between the sensor array and another circuit of the IC. The guard ring region includes a transistor structure having a first terminal, a second terminal and a gate. The temperature sensor arrangement further includes a thermally conductive element connected to the transistor structure and a first terminal of the first transistor. The thermally conductive element is configured to provide a thermally conductive path from the transistor structure to the first terminal of the first transistor.

主权项

1. A temperature sensor arrangement in an integrated circuit (IC), the temperature sensor arrangement comprising:
a sensor array configured to determine a temperature of the IC, wherein the sensor array comprises a first transistor having a first terminal, a second terminal and a gate; a guard ring region between the sensor array and another circuit of the IC, wherein the guard ring region comprises a transistor structure having a first terminal, a second terminal and a gate; and a thermally conductive element connected to the transistor structure and a first terminal of the first transistor, wherein the thermally conductive element is configured to provide a thermally conductive path from the transistor structure to the first terminal of the first transistor.