发明名称 NOZZLE AND LIQUID SUPPLY DEVICE
摘要 PROBLEM TO BE SOLVED: To obtain a nozzle and a liquid supply device which have new configuration hardly causing dripping.SOLUTION: According to an embodiment, the nozzle comprises a body. The body comprises a supply port to which liquid is supplied, a discharge port for discharging the liquid downward, and a flow channel extending to the supply port and the discharge port. The flow channel comprises: a reservoir part including a first portion where the liquid toward the discharge port is caused to flow downward, and a second portion provided downstream of the first portion and causing the liquid toward the discharge port to flow upward; and an exhaust part which can exhaust gas at an upstream side of the second portion while the liquid is not discharged from the discharge port and the liquid is reserved in the reservoir part.SELECTED DRAWING: Figure 2
申请公布号 JP2016178109(A) 申请公布日期 2016.10.06
申请号 JP20150054830 申请日期 2015.03.18
申请人 TOSHIBA CORP 发明人 TERADA TAKAHIRO;TANAKA MASAYUKI;KATO SHIGUMA;DEURA KAORI;MACHIDA MORIHIRO
分类号 H01L21/027;B05C5/00;B05C11/08 主分类号 H01L21/027
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