| 摘要 |
The present invention makes it possible to detect X-rays in a wide energy range in imaging using X-rays. An imaging device is provided with a container (10). The container (10) comprises a space on the interior thereof. In addition, the container (10) comprises an opening that is connected to the space. A silicon substrate (20) blocks the opening in the container (10). An electron source (30) is provided within the space in the container (10). The electron source (30) faces the silicon substrate (20). A conversion film (40) is positioned between the silicon substrate (20) and the electron source (30). The conversion film (40) is electrically connected to the silicon substrate (20). The conversion film (40) converts X-rays into an electric charge. An electrode (50) is positioned on the opposite side of the conversion film (40) with the silicon substrate (20) therebetween. The electrode (50) is electrically connected to the silicon substrate (20). |
