MICRO DEVICE TRANSFER SYSTEM WITH PIVOT MOUNT

摘要

Systems and methods for transferring a micro device from a carrier substrate are disclosed. In an embodiment, a micro pick up array mount includes a pivot platform to allow a micro pick up array to automatically align with a carrier substrate. Deflection of the pivot platform may be detected to control further movement of the micro pick up array.

主权项

1. A micro pick up array mount comprising:
a pivot platform; a base laterally around the pivot platform, wherein the pivot platform is movable relative to the base; a beam physically coupled with the pivot platform at an inner pivot and physically coupled with the base at an outer pivot; a voltage source contact on the base; an electrostatic voltage source contact on the pivot platform to transfer an operating voltage; a source trace that connects the voltage source contact to the electrostatic voltage source contact; a clamp contact on the base; a clamping electrode on the pivot platform; and a clamp trace that connects the clamp contact to the clamping electrode.