Optical Inspection System

摘要

Provided is an optical inspection system including a supporting unit, allowing a target object to be loaded thereon, a light source unit configured to emit a laser beam toward the target object, a light condensing unit collecting scattered light that is scattered at the target object when the laser beam is irradiated onto the target object, and a control unit controlling the light source unit and the light condensing unit and analyzing the scattered light to examine whether there are pollutants on the target object. The supporting unit may include a first supporting unit, on which the target object is disposed, and which is formed of a first material, and a second supporting unit, which is disposed under the first supporting unit and is formed of a second material different from the first material.

主权项

1. An optical inspection system, comprising:
a supporting unit; a light source unit configured to emit a laser beam toward a target object on the supporting unit; a light condensing unit configured to collect scattered light when the target object is irradiated with the laser beam; and a control unit configured to control the light source unit and the light condensing unit and to analyze the scattered light to determine if pollutants are on the target object, wherein the supporting unit comprises:
a first supporting member, on which the target object is disposed, and which comprises a first material; anda second supporting member under the first supporting member, wherein the second supporting member comprises a second material different from the first material.