TACTILE PROBING SYSTEM

摘要

A contact probe includes a stylus, a sensor, and two parallel substantially planar plates. The stylus has a contact. The sensor has a substantially planar shape and includes a fixed portion, at least three thin-walled portions each formed of a planar plate and having a strain sensor vapor-deposited thereon, and a movable portion to which the stylus is mounted and linked to the fixed portion via the thin-walled portions in at least three locations. The two parallel substantially planar plates are connected to the fixed portion on opposing sides and sandwich the movable portion so as to maintain a predetermined distance between the movable portion and the two parallel substantially planar plates and limit movement of the movable portion to a movable range. The sensor outputs a contact signal due to the strain sensors deforming in response to a measurement force from the stylus.

主权项

1. A contact probe, comprising:
a stylus having a contact; a sensor having a substantially planar shape and including a fixed portion, at least three thin-walled portions each formed of a planar plate and having a strain sensor vapor-deposited thereon, and a movable portion to which the stylus is mounted and linked to the fixed portion via the thin-walled portions in at least three locations, and two parallel substantially planar plates connected to the fixed portion on opposing sides and sandwiching the movable portion so as to maintain a predetermined distance between the movable portion and the two parallel substantially planar plates and limiting movement of the movable portion to a first movable range, wherein the sensor outputs a contact signal due to the strain sensors deforming in response to a measurement force from the stylus.