| 摘要 |
SOLUTION: A beam scanning device for convergence of beam which is projected to a radiated surface of an object to spot light on the radiated surface, and scanning the spot light in one-dimensionally comprises: a deflection member for reflecting incident beam, and deflecting the reflected beam in a range of a predetermined angle, for scanning the spot light; a light sending optic system for sending the incident beam so as to be directed to the deflection member; and a projection optic system to which the incident beam from the light sending optic system enters, and which projects the incident beam to the deflection member, and to which the reflected beam enters and which projects the spot light of the reflected beam to the radiated surface.SELECTED DRAWING: Figure 17 |
