| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate transportation processing apparatus capable of suppressing disorder of tension occurring to substrates traveling in a plurality of columns, and performing stable substrate processing by stabilizing a substrate transport position.SOLUTION: A substrate transportation processing apparatus is so configured that a substrate transportation part has a main roll part and a sub roll part which are arranged opposite each other and are wound with a plurality of substrates 2 to form a substrate parallel travel part 2a where the plurality of substrates 2 travel. The main roll part and sub roll part have pluralities of individual main rollers 51a-51c and individual sub rolls 52a, 52b, the numbers of which correspond to the number of the substrates 2 at the substrate parallel travel part 2a. The respective individual main rolls 51a-51c are driven by a driving source 54 to rotate through load limiting means 63a-63c each provided for one of the individual main rolls, and the load limiting means 63a-63c temporarily interrupt transmission of driving force from the driving source 54 when torque exceeding the set value is applied to corresponding individual main rolls 51a-51c.SELECTED DRAWING: Figure 3 |
