发明名称 METHODS OF FORMING CONDUCTIVE AND RESISTIVE CIRCUIT STRUCTURES IN AN INTEGRATED CIRCUIT OR PRINTED CIRCUIT BOARD
摘要 Described examples include methods (100) of fabricating conductive and resistive structures by direct-write variable impedance patterning using nanoparticle-based metallization layers or chemical reaction-based deposition. In some examples (100), a low conductivity nanoparticle material is deposited (110) over a surface. The nanoparticle material is selectively illuminated (112, 114, 116) at different applied energy levels via illumination source power adjustments and/or scan rate adjustments for selective patterned sintering to create conductive circuit structures as well as resistive circuit structures including gradient resistive circuit structures having an electrical resistivity profile that varies along the structure length. Further examples include methods in which a non-conductive reactant layer is deposited or patterned, and a second solution is deposited in varying amounts using an additive deposition for reaction with the reactant layer to form controllably conductive structures.
申请公布号 WO2016161212(A1) 申请公布日期 2016.10.06
申请号 WO2016US25442 申请日期 2016.03.31
申请人 TEXAS INSTRUMENTS INCORPORATED;TEXAS INSTRUMENTS JAPAN LIMITED 发明人 COOK, Benjamin, S.;HERBSOMMER, Juan, Alejandro
分类号 H01L21/8232;B82Y30/00;H01L23/50 主分类号 H01L21/8232
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