发明名称 NITRIDE SEMICONDUCTOR DEVICE
摘要 The present invention is provided with: a substrate (120); a nitride semiconductor laminated body (101), which is disposed on the substrate (120), and which has a channel region; a first electrode (107) and a second electrode (108), which are disposed on the nitride semiconductor laminated body (101); a first p-type nitride semiconductor layer (105) that is disposed between the first electrode (107) and the second electrode (108); and a first gate electrode (106) that is disposed on the first p-type nitride semiconductor layer (105). The nitride semiconductor laminated body (101) has a first recessed section (111), and at least a part of the first p-type nitride semiconductor layer (105) is disposed on the inner side of the first recessed section (111), and is separated from a first recessed section side surface (111a).
申请公布号 WO2016157718(A1) 申请公布日期 2016.10.06
申请号 WO2016JP01121 申请日期 2016.03.02
申请人 PANASONIC CORPORATION 发明人 KINOSHITA, Yusuke;UMEDA, Hidekazu;TAMURA, Satoshi
分类号 H01L21/338;H01L21/337;H01L27/098;H01L29/778;H01L29/808;H01L29/812 主分类号 H01L21/338
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