发明名称 |
NITRIDE SEMICONDUCTOR DEVICE |
摘要 |
The present invention is provided with: a substrate (120); a nitride semiconductor laminated body (101), which is disposed on the substrate (120), and which has a channel region; a first electrode (107) and a second electrode (108), which are disposed on the nitride semiconductor laminated body (101); a first p-type nitride semiconductor layer (105) that is disposed between the first electrode (107) and the second electrode (108); and a first gate electrode (106) that is disposed on the first p-type nitride semiconductor layer (105). The nitride semiconductor laminated body (101) has a first recessed section (111), and at least a part of the first p-type nitride semiconductor layer (105) is disposed on the inner side of the first recessed section (111), and is separated from a first recessed section side surface (111a). |
申请公布号 |
WO2016157718(A1) |
申请公布日期 |
2016.10.06 |
申请号 |
WO2016JP01121 |
申请日期 |
2016.03.02 |
申请人 |
PANASONIC CORPORATION |
发明人 |
KINOSHITA, Yusuke;UMEDA, Hidekazu;TAMURA, Satoshi |
分类号 |
H01L21/338;H01L21/337;H01L27/098;H01L29/778;H01L29/808;H01L29/812 |
主分类号 |
H01L21/338 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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