| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic lead switch that can enhance the rigidity of a beam portion for supporting a movable electrode portion and also can be configured in a compact size.SOLUTION: On a substrate 2 is formed a supporting portion 5a through a first anchor layer 4a, and also formed a beam portion 7a extending from the supporting portion 5a, and a movable electrode portion 7b at the tip portion of the beam portion 7a. Further, a fixed electrode portion 6b is formed through a second anchor portion 4b. The supporting portion 5a and the beam portion 7a and the movable electrode portion 7b include a silicon layer 11, a plating ground layer 12 formed on the silicon layer 11, and a magnetic material layer 13 formed on the plating ground layer 12. When magnetic field acts, the movable electrode portion 7b is magnetized, and contacts the fixed electrode portion 6b, so that current flows between the electrode portions 6b, 7b. Since the beam portion 7a has a silicon layer 11, the movable electrode portion 7b is firmly supported.SELECTED DRAWING: Figure 1 |
