光照射装置,申请号JP20150048881-传众专利搜索

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发明名称	光照射装置
摘要
申请公布号	JP6002261(B2)	申请公布日期	2016.10.05
申请号	JP20150048881	申请日期	2015.03.11
申请人	ＨＯＹＡＣＡＮＤＥＯＯＰＴＲＯＮＩＣＳ株式会社	发明人	紫藤和孝
分类号	H01L21/027;G02B5/00;G03F7/20	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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