发明名称 積層体および積層体の製造方法
摘要 Stacked films includes mica, a self-assembled film and a graphene film. The self-assembled film is formed on the mica. The graphene film is formed over the self-assembled film. The molecules that make up the self-assembled film have hydrophobic main chains.
申请公布号 JP6004092(B2) 申请公布日期 2016.10.05
申请号 JP20150512436 申请日期 2014.03.31
申请人 富士電機株式会社 发明人 藤井 健志;佐藤 まり子
分类号 H01L21/336;H01L29/786;H01L51/30 主分类号 H01L21/336
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