| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement detection mechanism of a cantilever which is not displacement detection by an optical lever type or a self detection type, and a scanning probe microscope using the same.SOLUTION: A cantilever displacement detection device 7 comprising an LC resonator 5 and an F-V converter 6 detects change in capacitance between a cantilever 1 and a sample surface, so that displacement of the cantilever 1 can be detected. This enables shape measurement and physical property measurement to be performed in a light-shielded state. In addition, change in a shape or physical property information of a sample depending on the presence or absence of light can be measured. |
