Thin film deposition apparatus

摘要

A thin film deposition apparatus used to produce large substrates on a mass scale and improve manufacturing yield. A thin film deposition apparatus for forming a thin film on a substrate, the apparatus comprising: a deposition source arranged to discharge a deposition material; a first nozzle disposed downstream of the deposition source and including a plurality of first slits arranged in a first direction; a second nozzle disposed downstream of the first nozzle and including a plurality of second slits arranged in a second direction perpendicular to the first direction; wherein the thin film deposition apparatus is arranged to perform deposition while the thin film deposition apparatus moves relative to the substrate in the first direction.