| 摘要 |
PURPOSE:To obtain a carbon material, etc., having high density in an extremely short time by carrying out a vapor-phase chemical reactional deposition under pressure. CONSTITUTION:A heat-insulation layer, having the shape of an inverted cup is placed in a high-pressure vessel 1 and a heater 8 is formed in the heat- insulation layer 7 to form a high-pressure high-temperature furnace chamber 10. A partition wall 11 is placed in the furnace chamber 10 to form a reactional chamber 13 in the furnace. The reactional chamber 13 has an inlet port 15 and an outlet port 16 to introduce and discharge a raw material gas for the vapor-phase chemical reaction. |
