| 摘要 |
The present invention addresses the problem of providing a monocrystalline substrate production method capable of easily producing a relatively large and thin monocrystalline substrate, and a monocrystalline member with a modified layer formed therein. The method comprises: a step for arranging in a non-contact state upon a monocrystalline member (10) a laser condensing means; a step for irradiating a surface (10t) of the monocrystalline member (10) with a laser beam (B), and condensing the laser beam (B) on the interior of the monocrystalline member (10); a step for moving the laser condensing means and the monocrystalline member (10) relative to each other, and forming a two-dimensional modified layer (12) in the interior of the monocrystalline member (10); and a step for forming a monocrystalline substrate (10s) by detaching, from the interface with the modified layer (12), a monocrystalline layer (10u) formed as a result of segmentation by the modified layer (12). |
