发明名称 OPTICAL KNIFE-EDGE DETECTOR WITH LARGE DYNAMIC RANGE
摘要 A detection arrangement and method for directing the sensitivity of an optical knife-edge detection system to its optimal operating point. This is referred to as an increase in the detection dynamic range of the system with advantageous applications for detecting motion of a surface such as for Atomic Force Microscopy as well as detecting acoustic vibrations on unstable surfaces. A pair of parallel reflecting surfaces, such as an optical slab waveguide, serve to reflect the sensing beam back onto the knife-edge detector once it is shifted off its sensing range. Allowing multiple reflections, the sensing beam is maintained on the knife-edge detector even at large angular offsets from the optimal operating point of the basic knife-edge detector. Use of a modified arrangement, with two knife-edge detectors at quadrature ensures near-optimal sensitivity at a detection dynamic range up to forty-fold larger than that of the basic knife-edge system.
申请公布号 EP3074777(A2) 申请公布日期 2016.10.05
申请号 EP20140824544 申请日期 2014.11.24
申请人 TECHNION - RESEARCH & DEVELOPMENT FOUNDATION LTD 发明人 AHARONI, ABRAHAM
分类号 G01Q20/02;G01D5/30;G01H9/00;G01L9/00 主分类号 G01Q20/02
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