| 摘要 |
PROBLEM TO BE SOLVED: To allow a distance between a condensation surface of a condensation plate and a coating film surface on a substrate to be held at a constant value, with high accuracy in an entire drying process, and to equalize a drying speed in a coating film surface, thereby improving uniformity of drying.SOLUTION: A drying device 1A has a condensation plate 11 faced to a coating film on a substrate f1, and condenses vapor of a solvent from the coating film by the condensation plate 11, for drying. The drying device 1 has a clearance holding roller 15a for holding a distance between a condensation surface 11a of the condensation plate 11 and a coating film surface f2a on the substrate f1 at a constant value. |
