METHOD FOR PREVENTING AGGLOMERATION OF CHARGED COLLOIDS WITHOUT LOSS OF SURFACE ACTIVITY
摘要
A method for chemically stabilizing polishing slurries in aqueous suspension to prevent their agglomeration while maintaining their surface activity is disclosed. The method prevents the formation of irreversible particle agglomerates during drying and permits the subsequent re-suspension of dried particles with no impact on the particle size distribution. The stabilization method can be customized based on knowledge of the colloid surface charge at suspension pH conditions, addition of a charged species having like charge to the colloid at the suspension conditions, and control of the concentrations of the charged species and other ions in suspension.
申请公布号
EP2914675(A4)
申请公布日期
2016.10.05
申请号
EP20130850914
申请日期
2013.10.16
申请人
LAWRENCE LIVERMORE NATIONAL SECURITY, LLC
发明人
DYLLA-SPEARS, REBECCA J.;FEIT, MICHAEL D.;MILLER, PHILIP E.;STEELE, WILLIAM A.;SURATWALA, TAYYAB I.;WONG, LANA L.