发明名称 半導体装置、半導体装置の製造方法及び熱電発電電子機器
摘要 The invention relates to a semiconductor device, a method for manufacturing a semiconductor device and an electronic thermoelectric power generation device, a semiconductor device having a thermoelectric conversion element that is embedded in a semiconductor chip so as to be integrated with a semiconductor circuit can be implemented. A semiconductor substrate is provided with a through opening for a region in which a thermoelectric conversion element is to be formed, and a thermoelectric conversion element is embedded in the through opening, where the thermoelectric conversion element includes: a number of penetrating rods made of a thermoelectric conversion material; and an insulating reinforcement layer in which the penetrating rods are embedded and of which the thermal conductivity is lower than that of the thermoelectric conversion material.
申请公布号 JP6003998(B2) 申请公布日期 2016.10.05
申请号 JP20140543023 申请日期 2012.10.22
申请人 富士通株式会社 发明人 栗原 和明;壷井 修;▲高▼馬 悟覚
分类号 H01L35/32;H01L35/34;H02N11/00 主分类号 H01L35/32
代理机构 代理人
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