| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of realizing a function as a silicon carbide optical waveguide element by forming an optical waveguide on a surface of silicon carbide.SOLUTION: An optical waveguide element includes a silicon carbide substrate 1 and a high refractive index material 2 having a refractive index higher than that of silicon carbide in an optical wavelength range being used and formed on the silicon carbide substrate 1. A graphene film with a single or equal to or less than ten atomic layers is provided between the silicon carbide substrate 1 and the high refractive index material 2. |
