| 摘要 |
The apparatus (101) has a sample table (102) receiving a sample, and a coolant receptacle containing a coolant e.g. liquid nitrogen. Thermal conduction elements (106a, 106b) connect the sample table with the coolant in a heat transmitting manner. A cooling finger (105) is connected to the coolant receptacle in a heat transmitting manner, and includes conduit through which coolant flows, where the conduit is connected with the coolant receptacle. A coolant pump controls coolant flow. A temperature measuring unit (122) measures temperature of the sample table. The coolant is selected from group of consisting of liquid nitrogen, liquefied gas and liquid air. An independent claim is also included for a method for adjusting temperature of a sample in an ion beam etching operation. |
