| 摘要 |
The objective of the present invention is to provide a triode type ionization vacuum gauge with which it is possible for the pressure of an object being measured to be measured without measuring errors, by reducing the influence of particles emitted from the surface of an ion collector. A triode type ionization vacuum gauge IG is provided with a filament 2, a grid 3 having a tubular outline, disposed around the filament, and a tubular ion collector 4 disposed around the grid and concentric with the grid. The triode type ionization vacuum gauge IG is further provided with a power source E1 for lighting the filament, a power source E2 for the grid, supplying the grid with a potential that is higher than that of the filament, and a power source E3 which makes the potential of the filament higher than the potential of the ion collector. Control is performed in such a way that the power supplied to the filament is at most equal to 4 W, and the emission current between the filament and the grid is in a range of 2 mA to 10 mA. |
